A

• Ar Argon
• AsH3 Arsine

B

• B2H6 Diborane
• BBr3 Boron Tribromide
• BCl3 Boron Trichloride
• BF3 Boron Trifluoride

C

• C2F6 Hexafluoroethane
• C2H2 Acetylene
• C2H6 Ethane
• C2HF5 Pentafluoroethane
• C3F8 Octafluoro Propane
• C3H6 Propylene
• C3H8 Propane
• C4F6 Hexafluoro-1,3-butadiene
• C4F8 Perfluoro cyclobutane
• C5F8 Octafluoro cyclopentene
• CF4 Carbon Tetrafluoride
• CH2F2 (HFC-32) Difluoromethane
• CH3F Fluoromethane
• CH3OH Methylalcohol
• CH4 Methane
• CHF3 (HFC-23) Trifluoromethane
• CO Carbon monoxide
• CO2 Carbon Dioxide
• Cl2 Chlorine
• ClF3 Chlorine Trifluoride

D

• D2 Deuterium
• DEZn Diethyl Zinc

F

• F2 Fluorine

G

• GeCl4 Germanium Tetrachloride
• GeF4 Germanium Tetrafluoride
• GeH4 Germane

H

• H2 Hydrogen
• H2S Hydrogen sulfide
• H2Se Hydrogen Selenide
• HBr Hydrogen Bromide
• HCl Hydrogen Chloride
• HF Hydrogen fluoride
• HI Hydrogen Iodide
• He Helium

K

• Kr Krypton

N

• N(CH3)3 Trimethyl Amine
• N2 Nitrogen
• N2O Nitrous Oxide
• ND3 Deuterated Ammonia
• NF3 Nitrogen Trifluoride
• NH3 Ammonia
• NO Nitric Oxide
• NO2 Nitrogen Dioxide
• Ne Neon

O

• O2 Oxygen
• O3 Ozone

P

• PF3 Phosphorustrifluoride
• PH3 Phosphine
• POCl3 Phosphorusoxychloride

S

• SF6 Sulfur Hexafluoride
• SO2 Sulfur Dioxide
• Si(OCH3)4 Tetramethoxysilane
• Si2H6 Disilane
• SiCl4 Tetrachlorosilane
• SiF4 Tetrafluorosilane
• SiH(CH3)3 Trimethylsilane
• SiH2Cl2 Dichlorosilane
• SiH3CH3 Methylsilane
• SiH4 Monosilane
• SiHCl3 Trichlorosilane
• SnCl4 Tin Tetrachloride

T

• TEB Triethyl borate
• TEGa Triethyl Gallium
• TEMAZ Tetrakis(ethylmethylamino) zirconium
• TEOP Triethyl phosphate
• TEOS Tetraethoxysilane
• TMAl Trimethyl Aluminum
• TMB Trimethyl borate
• TMGa Trimethyl Gallium
• TMIn Trimethyl Indium
• TMOP Trimethyl phosphate
• PET Pentaethoxytantalum
• TiCl4 Titanium tetrachloride

W

• WCl6 Tungsten Hexachloride
• WF6 Tungsten Hexafluoride

X

• Xe Xenon