Gas Supply System
Gas Cabinet / BSGS(Bulk Specialty Gas System)
Our cylinder cabinet has been developed under the basic policies "to strage special material gas safely" and "supply steadily", in order to satisfy strict needs of the industry. This functional cylinder cabinet, interfaced with gas and electronics, has materialized higher safety and compactness to ensure safer operations.
It is most advanced fully automatic cylinder cabinet that is the fruit of modern technologies.
Our sales record of cylinder cabinet with high quality and reliability exceeds 2,000 sets (for more than 15 years).
Please do not hesitate to contact us for anything you need to know about prices, delivery, and so on. We promise
most appropriate selection of specification to satisfy customers' needs.
Gas Cabinet CC2000S
SEMI
BSGS(Bulk Specialty Gas System)
Gas Experience
| No. | Gas Name | No. | Gas Name | ||
|---|---|---|---|---|---|
| 1 | Ar | Argon | 28 | H2 | Hydrogen |
| 2 | AsH3 | Arsine | 29 | H2S |
Hydrogen sulfide |
| 3 | B2H6 | Diborane | 30 | H2Se |
Hydrogen Selenide |
| 4 | BCL3 |
Boron Trichloride |
31 | HBr |
Hydrogen Bromide |
| 5 | C2F6 |
Hexafluoroethane |
32 | HCL |
Hydrogen Chloride |
| 6 | C2HF5 |
Pentafluoroethane |
33 | He | Helium |
| 7 | C3F6 |
Hexafluoropropylene |
34 | HF |
Hydrogen fluoride |
| 8 | C3F8 |
Octafluoro Propane |
35 | HI |
Hydrogen Iodide |
| 9 | C3H8 | Propane | 36 | Kr | Krypton |
| 10 | C4F6 |
Hexafluoro-1,3-butadiene |
37 | N2 | Nitrogen |
| 11 | C4F8 |
Perfluorocyclobutane |
38 | N2O |
Nitrous Oxide |
| 12 | C5F8 |
Octafluoro cyclopentene |
39 | Ne | Neon |
| 13 | CCL4 |
Carbon Tetrachloride |
40 | NF3 |
Nitrogen Trifluoride |
| 14 | CF4 |
Carbon Tetrafluoride |
41 | NH3 | Ammonia |
| 15 | CH2F2 |
Difluoromethane(HFC-32) |
42 | NO |
Nitric Oxide |
| 16 | CH3F |
Fluoromethane |
43 | O2 | Oxygen |
| 17 | CH3OH |
Methylalcohol |
44 | PH3 | Phosphine |
| 18 | CH4 |
Methane |
45 | SF6 |
Sulfur Hexafluoride |
| 19 | CHF3 |
Trifluoromethane(HFC-23) |
46 | Si2H6 | Disilane |
| 20 | CL2 | Chlorine | 47 | SiCL4 | Tetrachlorosilane |
| 21 | CLF3 |
Chlorine Trifluoride |
48 | SiF4 |
Tetrafluorosilane |
| 22 | CO |
Carbon monoxide |
49 | SiH(CH3)3 |
Trimethylsilane |
| 23 | CO2 |
Carbon Dioxide |
50 | SiH2CL2 |
Trimethylsilane |
| 24 | F2 | Fluorine | 51 | SiH4 |
Monosilane |
| 25 | F2+Ar+Ne |
Fluorine+Argon+Neon |
52 | SiHCL3 |
Trichlorosilane |
| 26 | F2+Kr+Ne |
Fluorine+Krypton+Neon |
53 | WF6 |
Tungsten Hexafluoride |
| 27 | GeH4 | Germane | 54 | Xe | Xenon |
Features of Full-auto Gas Cabinet
1. LCD touch panel control
Control would be done by the touch panel installed on the front door in an interactive way in order to prevent miss operation.
2. Automatic Purge
Auto purge function mounted for operation of safety management and gas purity maintenance.
3. Automatic leak check measurement
Auto leak check measurement function mounted that will check both by decompression and pressurization.
4. Automatic change
Automatic change operation enabled by standing-by the other cylinder after supply.
5. Load cell less tare display
Weight monitor is interior content display enabled, in case of load cell option.
6. Log management
Alarm, air supply and leak check log management function mounted.
Gas Cabinet appearance
Gas Cabinet appearance
BSGS appearance
