CMP Slurry Supply System
Features
- Supply by Pump System
- Dry-Out Prevention by Atomizer
- Accurate Blending
- Easy Operation with Touch Panel Interface
- Automated Flushing with DIW
Specifications
- Dimension: 1500mm(W) x 1000mm(D) x 2200mm(H)
- Blend & Supply Tanks: 50L x 2
- Supply: Consecutive Operation with 2 Diaphragm or Bellows Pumps
- Supply Capacity: 20L / min
System Flow
Options
- pH & Density Monitor
- Particle Monitor
- Ultra-Sonic Peroxide Concentration Monitor
- Conductivity Monitor
- CMP Communication I/O Box
- Valve Manifold Box
- Filtration System
- Auto Switchover Slurry Cabinet for;
5 Gal Bottle,
55 Gal Drum or
330 Gal Tote
Utilities
| DIW | 1/2” PFA Tubing 20L / Min (>0.2MPa) |
|---|---|
| CDA | 3/8” SST Fitting 400L / Min (>0.5MPa) |
| Nitrogen | 1/4” SST Fitting 10L / Min (>0.5MPa) |
| Power | AC100V 1.5KVA |
| Drain | VP25 (Process), VP16 (Cabinet) |
| Exhaust | 100mm dia. Flange |