Automatic Titration & Replenishment System
This system monitors the H2O2 concentration of CMP slurry by potentiometric titration system with an automatic sampling function and maintains it by replenishing calculated amount of H2O2.
Features
- Quick and precise measurement
- Precise replenishment by multiple sampling
- Easy operation by using Touch Panel interface
- External output of measurement data (Opt.)
Specifications
- STD Configuration: 2 Potentiometric titration cells + Replenish system
- STD Slurry supply lines: 3 lines
- Measurement Accuracy: ≤±0.01wt% (In case of 1.00wt% H2O2)
- Replenishment Accuracy: ≤±0.05wt% (Same as above)
- External output (Opt.): RS-232C CSV format and/or Analog output (4-20mA)
Utilities
- DIW: Max. 2L/min
- N2: Max. 2L/min (≥0.3MPa)
- CDA: 1L/min (≥0.5MPa)
- H2O2: Max. 2L/min
- Power: AC100V Max. 5A
- Exhaust: ⏀75
- Drain: Max. 2L/min
