・Supply by Pump System
・Dry-Out Prevention by Atomizer
・Accurate Blending
・Easy Operation with Touch Panel Interface
・Automated Flushing with DIW
・Dimension: 1500mm(W) x 1000mm(D) x 2200mm(H)
・Blend & Supply Tanks: 50L x 2
・Supply: Consecutive Operation with 2 Diaphragm or Bellows Pumps
・Supply Capacity: 20L / min
System Flow
・pH & Density Monitor
・Particle Monitor
・Ultra-Sonic Peroxide Concentration Monitor
・Conductivity Monitor
・CMP Communication I/O Box
・Valve Manifold Box
・Filtration System
・Auto Switchover Slurry Cabinet for;
5 Gal Bottle,
55 Gal Drum or
330 Gal Tote
| DIW | 1/2” PFA Tubing 20L / Min (>0.2MPa) |
|---|---|
| CDA | 3/8” SST Fitting 400L / Min (>0.5MPa) |
| Nitrogen | 1/4” SST Fitting 10L / Min (>0.5MPa) |
| Power | AC100V 1.5KVA |
| Drain | VP25 (Process), VP16 (Cabinet) |
| Exhaust | 100mm dia. Flange |
If you have questions about products and for more information,
Please fill out the following form.
