Automatic Titration & Replenishment System

This system monitors the H2O2 concentration of CMP slurry by potentiometric titration system with an automatic sampling function and maintains it by replenishing calculated amount of H2O2.

Automatic Titration & Replenishment System

Features

・Quick and precise measurement
・Precise replenishment by multiple sampling
・Easy operation by using Touch Panel interface
・External output of measurement data (Opt.)

Specifications

・STD Configuration: 2 Potentiometric titration cells + Replenish system
・STD Slurry supply lines: 3 lines
・Measurement Accuracy: ≤±0.01wt% (In case of 1.00wt% H2O2)
・Replenishment Accuracy: ≤±0.05wt% (Same as above)
・External output (Opt.): RS-232C CSV format and/or Analog output (4-20mA)

Utilities

・DIW: Max. 2L/min
・N2: Max. 2L/min (≥0.3MPa)
・CDA: 1L/min (≥0.5MPa)
・H2O2: Max. 2L/min
・Power: AC100V Max. 5A
・Exhaust: ⏀75
・Drain: Max. 2L/min

Utilities

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